Vertical Positioning Device. The M series Z.LR positioner offers an extended vertical travel range of 6mm at a footprint of 15mm x 15mm and a compact hight of 10mm. As the smallest positioner on the market at the given travel range, it is particularly suited for applications in confined spaces that require extended travel range.
M.Quano.Z.LR
In comparision to the M series Z positioner, the M.Quano.Z.LR offers an extended vertical travel range. Minimum step size: <30nm. Fine positioning accuracy: <1nm. Positioner Material: Molybdenum and Aluminium Nitride. Piezo Material: PZT ceramics.
Our Quano M product line includes a large range of versatile positioning devices for applications under various pressures (ambient to ultra-high vaccum) and temperatures (1 K < T< 373 K). The M line offers the ideal combination of of high positioning accuracy, reliable operation, heat management, mechanical stability, and competitive pricing. Therefore, the M-line is the ideal choice for applications in the semiconductor, space, and optical industry as well as research and development that need to move small payloads (<50g) over millimeter distances and operate under various static and dynamic environmental parameters.
Positional Encoding: Exact knowledge of the payload position can be required in some application. Our positioning devices can be optionally outfitted with a highly accurate encoding device that offers a positional read-out with accuracy up to 10 nm. The read-out scheme based on the geometric electrical capacitance ensures highest precision and does not increase the footprint of the positioning device, whil e being free of energy dissipation. These combined properties make it suited for the integration of the technically most demanding applications.