XYZ motion stack. The M-line XYZ positioner assembly offers the dispacement of a payload along all three spatial directions to realize complex positioning applications. Combining one M.Quano.Z with two M.Quano.X modules into a single unit, this assembly offers an extremely compact motion stack with travel range of 3.5mm (horizontal x- and y-directions) and 3mm (vertical z-direction). Its footprint (15mm x 15mm) and hight (24.4mm) make it the smallest XYZ-stack on the market.
M.Quano.XYZ
Fine positioning accuracy: <1nm
Positioner material: Molybdenum and aluminium nitride
Piezo material: PZT ceramics
Operating temperature: 1K to 390K
Non-magnetic and fully UHV compatibleOur Quano M product line includes a large range of versatile positioning devices for applications under various pressures (ambient to ultra-high vaccum) and temperatures (1 K < T< 373 K). The M line offers the ideal combination of of high positioning accuracy, reliable operation, heat management, mechanical stability, and competitive pricing. Therefore, the M-line is the ideal choice for applications in the semiconductor, space, and optical industry as well as research and development that need to move small payloads (<50g) over millimeter distances and operate under various static and dynamic environmental parameters.